2023 Spring Intensive Course: Bio-Micro/Nano Fabrication and Therapeutic Applications

Course: Bio-Micro/Nano Fabrication and Therapeutic Applications

Course Number: 11120IPHD500100

Tuhin Subhra Santra
Department of Engineering Design
Inidan Institute of Technology Madras, India

Schedule of the Intensive Course

May 19(Fri) 18:00-21:00
May 20(Sat) 10:00-12:00 13:00-17:00
May 26(Fri) 18:00-21:00
May 27(Sat) 10:00-12:00 13:00-17:00


Introduction to Bio-Micro/Nano devices, device design, implementation, device materials etc. Fabrication Fabrication pathways of Bio-Micro/Nanosystems: clean room, wafer cleaning, Lithography, Oxidation, wet/dry etching, Silicon wet etching, glass wet etching, Electroplating, Diffusion, Evaporation, sputtering, Chemical Vapor Deposition, Physical vapor deposition, plasma enhance chemical vapor deposition (PECVD), low pressure chemical vapor deposition, microfluidic devices made by PDMS/PMMA. Nanofabrication by replication, Nanofabrication by self-assembly.

Bio-Micro/nano devices in life science-

Biomedical microfluidic process technology, biomedical nanotechnology, cellular therapy and diagnostics, single cell technologies, single cell electroporation, photoporation, mechanoporation. Single cell therapy and diagnostics.